報告題目：Laser Chemical Vapor Deposition
報 告 人：Takashi Goto （New Industry Creation Center, Tohoku University, Japan；Wuhan University of Technology, China）
時 間👨🏽💼：2019年5月6日13:00-15:00
地 點：海洋樓109
報告摘要⇨：
Chemical vapor deposition (CVD) is a versatile technique to synthesize films with finely controlled microstructure, and therefore it has been employed in industry for electrical and mechanical applications. CVD generally needs high-temperature to promote chemical reactions for deposition, and CVD is rather inefficient process. Laser-assisted chemical vapor deposition (LCVD) is known to deposit films at low temperature; however, it is only possible to prepare very thin and small deposits. We have found that high power continuous laser enables one to prepare films at a significantly high deposition rate often more than several 1000 times higher than conventional LCVD at moderate temperature. Laser in LCVD can significantly accelerate chemical reactions, and therefore the deposition rate of LCVD is not limited by chemical reaction but mass transfer of source gases. The deposition rate increases with increasing the supply of source gases, and reached 27.5 mm/h for SiO2 film by using TEOS (Tetraethyl orthosilicate) and 5 mm/h for SiC film by using SiCl4 and CH4. Laser can also accelerate crystal growth of deposits, and thus highly (001)-oriented YBa2Cu3O7-d and (001)-oriented NaTaO3 films have been prepared exhibiting the highest superconductivity and photocatalytic activity, respectively. Al2O3-ZrO2, SiO2-ZrO2 and SiC-SiO2 nano-composite films have been also prepared by LCVD by using multicomponent source gases. By scanning laser or moving substrate, large scale coatings such as YSZ (yttria stabilized zirconia) thermal barrier coating were fabricated on a large scale and complicated shaped metal substrates.
後藤孝教授簡介：
後藤孝教授在國際上率先開發出激光化學氣相沉積技術，實現了薄膜材料的大面積、高速沉積，廣泛應用於熱障塗層、超硬塗層🤩、生物塗層、光觸媒薄膜、高溫超導薄膜和鐵電薄膜的研究和開發，相關研究成果獲日本陶瓷協會研究學術賞（2002年）🐕、粉末冶金協會研究功績獎（2007年）🈴。後藤孝教授先後承擔了日本文部科學省➾、日本學術振興會、新能源產業技術開發機構的20多項重大科研項目🏎，是全球優秀人才中心（GCOE）材料融合項目的首席科學家，還多次組織國際學術會議，擔任會議主席並受邀做大會報告。